You get much better heat transfer in an oven filled with inert gas compared to a vacuum where the heat transfer is due to radiation only.
I typically backfill with Ar because I have a cylinder for my TIG welder but most folks use dry N2.
I think CO2 would work well from a heat transfer perspective and it is really cheap. thanks to the paintball fanatics.
I pull and purge a couple of times because the purge connection on my oven does not create crossflow.
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