Anyone out there had any success with pumps made by someone other than Edwards for their WFE set-ups? It would be for a 6" glass configuration. I am attempting to learn what options exist if any.
Thanks!
Leybold ,alcatel , busch , pfeiffer
Al make high class vacuum pumps
But i would also look for A diffusion unit
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Heard and thank you! I will start comparing models/tech info.
What size is recomended
For first pass And second pass
Below is what they are selling with their setup but everyone is saying to buy a better pump. We are scheduled to place the order Friday so this is all I know as of yet.
Vacuum pump
Pump Rate: 9CFM
Oil Consumption:1.5L
Ultimate Partial Pressure: <4x10-4mbar
Rotating Speed: 1420r/min
Motor Power: 0.55kW. 0.7HP
Electricity: 220V, Single/3P
Again, their diffusion setup which is junk also I am told.
Diffusion pump
Diameter: 100mm
Pump rate: 300Lps
Vacuum degree: 5*10-2pa
Heating Power: 700W
Electricity: 220V
I am also trying to discern how to read this, “Ultimate Partial Pressure: <4x10-4mbar” Can you explain what the quoted text means? I see it in relation to pumps but at this point I am just guessing it means the pumps can operate between 10 and 4 mbar but not sure about the 4X it references.
if it has a 100mm flange you could easily swap for another 100mm pump like a difstak.
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ahhhhh.
It isn’t a range , it is a negative power of 10. I was confused by the way it was written.
Many thanks!
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No worriesTM
That would be why I went to the effort of
<sup>-4</sup>
so it looked right…
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And that’s why a little effort goes a long way!
Thanks again!
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I use the leybold d25b its the biggest tou can ver thats single phase. There built like tanks and work great, i have all the other major brands and there just sitting on the floor, even using one as a door stop if I remember right
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I would give beaker and wrench a call and ask what they recomend on the unit for the are familiar with them inside. Out
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Check out the guys at HighVac
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